C00358 - SEMI C3.58 - 八フッ化シクロブタン（C4F8），電子グレード，シリンダ充填，品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded SEMI P45-1218 (technical revision)

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Description

SEMI P45-1218 (technical revision)

本ガイドは，MEからのF-GHG排出特性評価に適用される。

orgで入手可能となる。初版は1997年発行。前版は2005年11月発行。

Generic Services

SEMI M61-0612 (Reapproved 0319)

C00358 - SEMI C3.58 - 八フッ化シクロブタン（C4F8），電子グレード，シリンダ充填，品質99.999%の仕様 Revision:SEMI C3.58-0303 - Superseded SEMI P45-1218 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20033 (C4F8) (C4F8) Referenced SEMI Standards None.

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