G08100 - SEMI G81 - マップデータ・アイテムの仕様 StdPbc-0324 1 2インチ鏡面研磨単結晶シリコンウェーハ（セカンダリフラットあり）

1 2インチ鏡面研磨単結晶シリコンウェーハ（セカンダリフラットあり）

SEMI C36 — Specifications for Phosphoric Acid

1  This Guide defines components of bulk chemical distribution systems (BCDS) and sets forth basic design elements and optional design features common to BCDS

form a complete Interoperability Specification for the ISPM

1-0702 (Reapproved 0308)

G08100 - SEMI G81 - マップデータ・アイテムの仕様 StdPbc-0324 1 2インチ鏡面研磨単結晶シリコンウェーハ（セカンダリフラットあり）NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Automated Test Committee2003312global Audits and Reviews Subcommittee20035www. semi. org200020033 SEMI G81SEMI G81. 10307 Subordinate Standard: SEMI G81. 1 0307 Referenced SEMI Standards SEMI E5 SEMI Equipment Communications